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microsensors (sensors, <measuring devices for extent>, ... Furnishings and Equipment (hierarchy name)) |
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Note: Any miniaturized probe with physical dimensions in the submicrometer to millimeter range. Microsensors are manufactured using microelectromechanical systems (MEMS) technology.
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| Terms: |
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| microsensors (preferred,C,U,English-P,D,U,PN)
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| microsensor (C,U,English,AD,U,SN)
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| microsensor (Dutch,AD,U,U)
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| micro-sensor (C,U,English,UF,U,U)
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| microsensoren (C,U,Dutch-P,D,U,U)
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Facet/Hierarchy Code: V.TN |
Hierarchical Position:
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Objects Facet |
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.... Furnishings and Equipment (hierarchy name) (G) |
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........ Measuring Devices (hierarchy name) (G) |
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............ measuring devices (instruments) (G) |
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................ <measuring devices for extent> (G) |
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.................... sensors (G) |
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........................ microsensors (G) |
Additional Notes: |
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| Dutch ..... Een miniatuursonde met fysieke afmetingen die op submicrometer- tot millimeterschaal gemeten worden. Microsensoren worden geproduceerd met behulp van microelectromechanical systems- of MEMS-technologie. |
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Sources and Contributors: |
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