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atomic layer deposition (coating (process), <surface covering processes and techniques>, ... Processes and Techniques (hierarchy name)) |
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Note: A technique for depositing a film onto a surface in monolayers by utilizing a self-limiting chemical reaction. It is a vapor phase technique capable of producing thin films of a variety of materials.
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| Terms: |
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| atomic layer deposition (preferred,C,U,English,D,U,N)
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| ALD (C,U,English,UF,U,U)
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Facet/Hierarchy Code: K.KT |
Hierarchical Position:
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Activities Facet |
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.... Processes and Techniques (hierarchy name) (G) |
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........ <processes and techniques by specific type> (G) |
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............ <additive and joining processes and techniques> (G) |
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................ <surface covering processes and techniques> (G) |
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.................... coating (process) (G) |
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........................ atomic layer deposition (G) |
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