 |
|
|
|
|
|
|
Research Home
 Tools Art & Architecture Thesaurus Full Record Display
|
|
|
|
 |
|
|
|
 |
 |
|
|
|
|
|
|
Click the  icon to view the hierarchy. |
|
|
spectroscopic ellipsometry (measuring, analysis and testing techniques, ... Processes and Techniques (hierarchy name)) |
|
Note: A nondestructive, noninvasive optical technique used to test the dielectric properties of thin films. Spectroscopic ellipsometry (SE) employs broadband light sources to measure refractive index, absorption coefficient, and film thickness from the polarization characteristics of linearly polarized incident light reflected from the sample's surface.
|
| Terms: |
|
| spectroscopic ellipsometry (preferred,C,U,English-P,D,U,U)
|
| ellipsometry, spectroscopic (C,U,English,UF,U,U)
|
| SE (C,U,A,English,UF,U,U)
|
| spectroscopische ellipsometrie (C,U,Dutch-P,D,U,U)
|
|
Facet/Hierarchy Code: K.KT |
Hierarchical Position:
|
|
|
Activities Facet |
|
|
.... Processes and Techniques (hierarchy name) (G) |
|
|
........ <processes and techniques by specific type> (G) |
|
|
............ analysis and testing techniques (G) |
|
|
................ measuring (G) |
|
|
.................... spectroscopic ellipsometry (G) |
Additional Notes: |
|
| Dutch ..... Een niet-destructieve, niet-invasieve optische techniek om de diëlektrische eigenschappen van dunne films te testen. Bij spectroscopische ellipsometrie (SE) worden breedbandlichtbronnen gebruikt om de brekingsindex, absorptiecoëfficiënt en de dikte van de film te meten op basis van de polarisatie-eigenschappen van lineair gepolariseerd invallend licht dat door het oppervlak van het monster wordt gereflecteerd. |
|
Sources and Contributors: |
|
|
|
