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Auger electron spectroscopy (emission spectroscopy, spectroscopy, ... Processes and Techniques (hierarchy name)) |
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Note: Sensitive surface analytical technique that measures secondary electrons excited by an incident electron beam. This technique is used to determine elemental composition of the top few nanometers of solid, electrically conductive materials. |
Terms: |
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Auger electron spectroscopy (preferred,C,U,English-P,D,U,U)
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Auger electron spectroscopy (Dutch-P,D,U,U)
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spectroscopy, Auger electron (C,U,English,UF,U,U)
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AES (Auger electron spectroscopy) (C,U,A,English,UF,U,U)
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scanning Auger microscopy (C,U,English,UF,U,U)
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SAM (analysis technique) (C,U,A,English,UF,U,U)
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Facet/Hierarchy Code: K.KT |
Hierarchical Position:
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Activities Facet |
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.... Processes and Techniques (hierarchy name) (G) |
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........ <processes and techniques by specific type> (G) |
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............ analysis and testing techniques (G) |
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................ spectroscopy (G) |
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.................... emission spectroscopy (G) |
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........................ Auger electron spectroscopy (G) |
Additional Notes: |
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Dutch ..... Een gevoelige oppervlakteanalysetechniek waarin secundaire elektronen gemeten worden die door een invallende elektronenstraal geëxciteerd zijn. Deze techniek wordt gebruikt om de elementsamenstelling van de bovenste paar nanometer van vaste, geleidende materialen vast te stellen. |
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Related concepts: |
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associated with .... |
electron energy loss spectroscopy |
............................ |
(emission spectroscopy, spectroscopy, ... Processes and Techniques (hierarchy name)) [300390591] |
distinguished from .... |
atomic emission spectroscopy |
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(emission spectroscopy, spectroscopy, ... Processes and Techniques (hierarchy name)) [300390519] |
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